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Optics InfoBase > Conference Papers > OIC > 2004 > ME > Page ME9 © 2004 OSA

Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 27, 2004
ISBN: 3-5400-0364-9
Deposition of Optical Coatings III (ME)

Improved rate control for E-beam evaporation and evaluation of optical performance improvements

Michael Gevelber, Bing Xu, and Douglas Smith

http://dx.doi.org/10.1364/OIC.2004.ME9


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Abstract

A new deposition rate control and E-gun strategy has been developed which significantly reduces growth rate variations for E-beam deposited SiO2 coatings. The resulting improvements in optical performance are evaluated for multilayered bandpass filters.

© 2004 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization

Citation
M. Gevelber, B. Xu, and D. Smith, " Improved rate control for E-beam evaporation and evaluation of optical performance improvements," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper ME9.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2004-ME9


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