A new deposition rate control and E-gun strategy has been developed which significantly reduces growth rate variations for E-beam deposited SiO2 coatings. The resulting improvements in optical performance are evaluated for multilayered bandpass filters.
© 2004 Optical Society of America
M. Gevelber, B. Xu, and D. Smith, " Improved rate control for E-beam evaporation and evaluation of optical performance improvements," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper ME9.
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