Thin film tunable filters without moving parts use thermo-optic effects in PECVD amorphous silicon. Demonstrations include single and multiple cavity tunable filters, and fixed wavelength switchable WDM add/drop filters using hybrid dielectric / semiconductor cavities.
© 2004 Optical Society of America
L. Domash, " Tunable thin film tilters using thermo-optic silicon," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper ThB2.
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