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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 27, 2004
ISBN: 3-5400-0364-9
Filter III/Stress (ThE)

Stress, microstructure and thermal-elastic properties of evaporated thin MgF2 - films

Roland Thielsch, Joerg Heber, Torsten Feigl, and Norbert Kaiser


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Mechanical stress, microstructure and thermal-elastic properties of thin evaporated MgF2 films were studied in dependence on substrate temperature. Data on biaxial modulus and coefficient of thermal expansion of 50nm thick films are presented.

© 2004 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization
(310.6870) Thin films : Thin films, other properties

R. Thielsch, J. Heber, T. Feigl, and N. Kaiser, " Stress, microstructure and thermal-elastic properties of evaporated thin MgF2 - films," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper ThE6.

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