Stress, microstructure and thermal-elastic properties of evaporated thin MgF2 – films

R. Thielsch; J. Heber; T. Feigl; N. Kaiser

doi:10.1364/OIC.2004.ThE6

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2004),
paper ThE6
•https://doi.org/10.1364/OIC.2004.ThE6

Stress, microstructure and thermal-elastic properties of evaporated thin MgF₂ – films

R. Thielsch, J. Heber, T. Feigl, and N. Kaiser

Optical Interference Coatings 2004

Tucson, Arizona United States
27 June–2 July 2004
ISBN: 3-5400-0364-9

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R. Thielsch, J. Heber, T. Feigl, and N. Kaiser, "Stress, microstructure and thermal-elastic properties of evaporated thin MgF2 – films," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2004), paper ThE6.

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Abstract

Mechanical stress, microstructure and thermal-elastic properties of thin evaporated MgF₂ films were studied in dependence on substrate temperature. Data on biaxial modulus and coefficient of thermal expansion of 50nm thick films are presented.

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