Mechanical stress, microstructure and thermal-elastic properties of thin evaporated MgF2 films were studied in dependence on substrate temperature. Data on biaxial modulus and coefficient of thermal expansion of 50nm thick films are presented.
© 2004 Optical Society of America
R. Thielsch, J. Heber, T. Feigl, and N. Kaiser, " Stress, microstructure and thermal-elastic properties of evaporated thin MgF2 - films," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper ThE6.
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