We report on the progress in real-time deposition control in the fabrication of non-quarter-wave multi-layer optical designs with demanding specifications. A combination of real-time ellipsometric and spectrophotometric monitoring was used to achieve sub-nanometer accuracy.
© 2004 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings
S. Dligatch and R. P. Netterfield, " Real time process control and monitoring in multi-layer filter deposition," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper TuE5.
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