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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 27, 2004
ISBN: 3-5400-0364-9
Monitoring (TuE)

Real time process control and monitoring in multi-layer filter deposition

Svetlana Dligatch and Roger P. Netterfield

http://dx.doi.org/10.1364/OIC.2004.TuE5


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Abstract

We report on the progress in real-time deposition control in the fabrication of non-quarter-wave multi-layer optical designs with demanding specifications. A combination of real-time ellipsometric and spectrophotometric monitoring was used to achieve sub-nanometer accuracy.

© 2004 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings

Citation
S. Dligatch and R. P. Netterfield, " Real time process control and monitoring in multi-layer filter deposition," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper TuE5.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2004-TuE5


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