Abstract
High performance coatings for the next-generation micro-mechanical mirrors have been developed. The high reflective metal systems are applicable in MOEMS from the NIR down to the VUV spectral region.
© 2004 Optical Society of America
PDF ArticleMore Like This
Alexandre Gatto, Norbert Kaiser, Stefan Günster, Detlev Ristau, Mauro’ Trovo, and Miltcho Danailov
WF9 Optical Interference Coatings (OIC) 2004
Stefan Günster, Detlev Ristau, Alexandre Gatto, Norbert Kaiser, Mauro Trovó, and Miltcho Danailov
WF8 Optical Interference Coatings (OIC) 2004
C. Montcalm, J.C. Davidson, R.F. Grabner, R.M. Hudyma, B.B. Kaufmann, P.A. Kearney, M.A. Schmidt, R. Soufli, E. Spiller, C.C. Walton, and J.A. Folta
ThA1 Optical Interference Coatings (OIC) 2001