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Crystallographic evaluation of ion-assisted SiO2 thin film with EELS in TEM and AES

T. Aoki, S. Ogura, K. Muro, and T. Watanabe

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Abstract

We tried evaluation for an amorphous silica film with EELS in atomic scale. In film deposition, ion assist in evaporation change the amorphous to crystalline film was found.

© 2004 Optical Society of America

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