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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 27, 2004
ISBN: 3-5400-0364-9
Characterization of Optical Coatings II (WE)

Accurate formulas for estimating the effect of surface micro-roughness on ellipsometric angles of dielectric thin films

Andrei A. Tikhonravov, Alexander V. Tikhonravov, and Michael K. Trubetskov

http://dx.doi.org/10.1364/OIC.2004.WE4


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Abstract

Accurate formulas for the variations of ellipsometric angles caused by the surface micro-roughness are derived. These formulas are used for estimating sensitivities of the ellipsometric angles to the thickness of surface overlayer presenting surface micro-roughness.

© 2004 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings

Citation
A. A. Tikhonravov, A. V. Tikhonravov, and M. K. Trubetskov, " Accurate formulas for estimating the effect of surface micro-roughness on ellipsometric angles of dielectric thin films," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper WE4.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2004-WE4


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