Accurate formulas for the variations of ellipsometric angles caused by the surface micro-roughness are derived. These formulas are used for estimating sensitivities of the ellipsometric angles to the thickness of surface overlayer presenting surface micro-roughness.
© 2004 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings
A. A. Tikhonravov, A. V. Tikhonravov, and M. K. Trubetskov, " Accurate formulas for estimating the effect of surface micro-roughness on ellipsometric angles of dielectric thin films," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper WE4.
References are not available for this paper.