MgF2 and GdF3 are used for the coating at 193nm. Single layer and multi-layer coatings were deposited by resistive heating boat. Optical characteristics, microstructure and stress of the films have been investigated.
© 2004 Optical Society of America
M. Liu, C. Lee, M. Kaneko, K. Nakahira, and Y. Takano, " Microstructure related properties at 193nm of MgF2 and GdF3 films deposited by resistive heating boat," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper WF3.
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