Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Microstructure related properties at 193nm of MgF2 and GdF3 films deposited by resistive heating boat

Not Accessible

Your library or personal account may give you access

Abstract

MgF2 and GdF3 are used for the coating at 193nm. Single layer and multi-layer coatings were deposited by resistive heating boat. Optical characteristics, microstructure and stress of the films have been investigated.

© 2004 Optical Society of America

PDF Article
More Like This
Fluoride antireflection coatings at 193nm by resistive heating boat

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
FA7 Optical Interference Coatings (OIC) 2007

Plasma ion-assisted deposition of TiO2 and MgF2 thin films

S. H. WOO, C. K. HWANGBO, Y. B. SON, I. C. MOON, and G. M. KANG
MB8 Optical Interference Coatings (OIC) 2004

Stress, microstructure and thermal-elastic properties of evaporated thin MgF2 – films

R. Thielsch, J. Heber, T. Feigl, and N. Kaiser
ThE6 Optical Interference Coatings (OIC) 2004

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved