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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 27, 2004
ISBN: 3-5400-0364-9
Short and Intense Wavelength Coatings (WF)

Microstructure related properties at 193nm of MgF2 and GdF3 films deposited by resistive heating boat

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano

http://dx.doi.org/10.1364/OIC.2004.WF3


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Abstract

MgF2 and GdF3 are used for the coating at 193nm. Single layer and multi-layer coatings were deposited by resistive heating boat. Optical characteristics, microstructure and stress of the films have been investigated.

© 2004 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings
(310.6860) Thin films : Thin films, optical properties

Citation
M. Liu, C. Lee, M. Kaneko, K. Nakahira, and Y. Takano, " Microstructure related properties at 193nm of MgF2 and GdF3 films deposited by resistive heating boat," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2004), paper WF3.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2004-WF3


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