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Conferences > OIC > 2004 > WF > WF4

Optical coatings for the 157 nm full-field exposure tool FS1

M. Otani, T. Itoh, S. Kuwabara, R. Biro, H. Fukushima, G. S. Jung, and K. Sone

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Abstract

Canon’s 157 nm full-field exposure tool FS1 is in the stage of the total evaluation on the actual production tool. The optical performance of the coatings used for the FS1 is presented.

© 2004 Optical Society of America

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