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X rays reflective multilayers optic for Microbeam Radiation Therapy at the European Synchrotron Radiation Facility

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Abstract

We present first experimental results on the fabrication and characterization of x-ray reflective multilayers providing micro beams for synchrotron radiation therapy foreseen at the ESRF insertion device medical beamline ID17. We have designed a non-periodic multilayer structure on a patterned substrate generating 25 μm and 50 μm wide micro beams with an optimized peak to valley intensity ratio within the beam array. We will describe the optic development (multilayer deposition process) as well as its performance obtained under synchrotron radiation.

© 2007 Optical Society of America

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