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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 3, 2007
ISBN: 1-55752-841-1
Short and Intense Wavelength Coatings (FA)

Determination of Optical Constants of Thin Films in the VUV and Soft X-ray Spectral Region with Synchrotron Spectroscopic Ellipsometry

Minghong Yang

http://dx.doi.org/10.1364/OIC.2007.FA6


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Abstract

Optical constants determination of thin films used in the XUV spectral region is experimentally demonstrated with BESSY II synchrotron ellipsometry, which can provide continuous, precise spectra of optical constants over a broadband XUV spectral region.

© 2007 Optical Society of America

OCIS Codes
(160.0160) Materials : Materials
(160.4760) Materials : Optical properties
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties

Citation
M. Yang, " Determination of Optical Constants of Thin Films in the VUV and Soft X-ray Spectral Region with Synchrotron Spectroscopic Ellipsometry," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper FA6.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2007-FA6


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