Fluoride materials, MgF2,AlF3,LaF3 and GdF3 are used for antireflection coatings at 193nm by resistive heating boat. Optical characteristics, microstructure, stress, and laser-induced damage threshold (LIDT) of the films have been investigated.
© 2007 Optical Society of America
M. Liu, C. Lee, M. Kaneko, K. Nakahira, and Y. Takano, " Fluoride Antireflection Coatings at 193nm by Resistive Heating Boat," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper FA7.
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