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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 3, 2007
ISBN: 1-55752-841-1
Short and Intense Wavelength Coatings (FA)

Fluoride Antireflection Coatings at 193nm by Resistive Heating Boat

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano


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Fluoride materials, MgF2,AlF3,LaF3 and GdF3 are used for antireflection coatings at 193nm by resistive heating boat. Optical characteristics, microstructure, stress, and laser-induced damage threshold (LIDT) of the films have been investigated.

© 2007 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1210) Thin films : Antireflection coatings
(310.6860) Thin films : Thin films, optical properties

M. Liu, C. Lee, M. Kaneko, K. Nakahira, and Y. Takano, " Fluoride Antireflection Coatings at 193nm by Resistive Heating Boat," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper FA7.

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