We report on the preparation and characterization of the optical constants of silicon coatings deposited by electron-beam-gun with plasma-IAD. Through the fabrication of longwave-pass filters we assure the reliability of the optical constants we determined.
© 2007 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties
S. Bruynooghe, " Optical Properties of Plasma Ion-Assisted Deposition Silicon Coatings: Application to the Manufacture of Blocking Filters for the Near-Infrared Region," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper MB2.
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