A generalized surface scatter theory results in an improved solution to the inverse scattering problem. This new solution eliminates undesirable artifacts in the surface PSD function predicted from the classical Rayleigh-Rice theory.
© 2007 Optical Society of America
J. E. Harvey and A. Krywonos, " Improved Characterization of Optical Surfaces from Scattered Light Measurements," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper ThA4.
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