Abstract
We have developed a process for broadband antireflection coating of fully fabricated silicon imagers. We discuss modeling, deposition, and optical testing. Results show that many detector goals can be met with a silicon nitride/oxide structure
© 2007 Optical Society of America
PDF ArticleMore Like This
Baohua Jia, Yinan Zhang, Xiaorui Zheng, and Min Gu
PW2B.2 Optical Nanostructures and Advanced Materials for Photovoltaics (SOLED) 2014
Tatiana V. Amotchkina, Alexander V. Tikhonravov, Michael K. Trubetskov, and Sergey A. Yanshin
WB5 Optical Interference Coatings (OIC) 2007
Erika Hamden, Jordana Blacksberg, Blake Jacquot, Todd Jones, Michael Hoenk, Matt Dickie, Shouleh Nikzad, and David Schiminovich
MD6 Optical Interference Coatings (OIC) 2010