Nanoamorphous structure, homogeneous microstructure, smooth topography, high density, and excellent optical and mechanical properties were obtained with metal oxide films deposited by reactive low-voltage ion plating. Reliable reproducibility and environmental stability could be achieved.
© 2007 Optical Society of America
H. Pulker, " Nanoamorphous Optical Coatings," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper TuA1.
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