Shadow moiré method used to measure stress of thin film on flexible substrates was proposed. For Al film deposited on polyimide substrate, using DC magnetron sputtering, the corresponding tensile stress is 0.450±0.042GPa.
© 2007 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(310.0310) Thin films : Thin films
(310.6870) Thin films : Thin films, other properties
K. Lee, C. Tang, H. Chen, and C. Lee, " Stress Measurement of Al Film Deposited on Flexible Substrates by Shadow Moiré Method," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper TuB4.
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