Major e-beam nonlinearities are identified by a vision system in production coaters. A silica evaporation model is used to investigate deposition rate dynamics and source thermal distribution to develop improved sweep designs for subliming materials.
© 2007 Optical Society of America
M. Gevelber, B. Xu, and G. Reimann, " Tools for Improving Precision Optical Coatings through E-Beam Sweep Design," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper TuCPDP1.
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