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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 3, 2007
ISBN: 1-55752-841-1
Birefringent Coatings / Polarizer Coatings (TuC)

Tools for Improving Precision Optical Coatings through E-Beam Sweep Design

Michael Gevelber, Bing Xu, and Gregory Reimann

http://dx.doi.org/10.1364/OIC.2007.TuCPDP1


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Abstract

Major e-beam nonlinearities are identified by a vision system in production coaters. A silica evaporation model is used to investigate deposition rate dynamics and source thermal distribution to develop improved sweep designs for subliming materials.

© 2007 Optical Society of America

OCIS Codes
(160.0160) Materials : Materials
(160.4670) Materials : Optical materials
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication

Citation
M. Gevelber, B. Xu, and G. Reimann, " Tools for Improving Precision Optical Coatings through E-Beam Sweep Design," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper TuCPDP1.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2007-TuCPDP1


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