200μg/cm2 free-standing Zr filters of 20mm in diameter were prepared .Results show that the transmittance is 19% at 13.9nm, Carbon, Oxygen and Nitrogen are the major impurities that affect transmittance in the soft X-ray region.
© 2007 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2440) Instrumentation, measurement, and metrology : Filters
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
Y. Wu, L. Zhang, H. Cao, X. Zheng, H. Jiao, and L. Chen, " Preparation and Characterization of Free-Standing Zr Filter for Soft X-ray Laser Application," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper TuD9.
References are not available for this paper.