A modified Stoney’s equation is provided to solve the coefficients of thermal expansion and biaxial modulus of the thin film when the thickness ratio (thin film thickness/substrate thickness) is larger than 1%.
© 2007 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.6810) Instrumentation, measurement, and metrology : Thermal effects
(310.0310) Thin films : Thin films
(310.6870) Thin films : Thin films, other properties
C. Kuo, S. Chen, and C. Lee, " Coefficient of Thermal Expansion and Biaxial Modulus of Thin Films on a Thin Substrate," in Optical Interference Coatings, OSA Technical Digest (CD) (Optical Society of America, 2007), paper WD7.
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