Several micron thick silicon films deposited by magnetron sputtering have a nearly amorphous structure. Optical elements coated with theses films can be machined, polished, and structured in order to achieve ultra-precise optical components.
© 2010 The Optical Society
M. Schürmann, P. Jobst, N. Kaiser, A. Kolbmüller, S. Müller, A. Gebhardt, S. Risse, and R. Eberhardt, "Ultra-precise Optical Components with Machinable Silicon Layer," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper PDWD15.
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