Ultra-precise optical components with machinable silicon layer

M. Schürmann; P.-J. Jobst; N. Kaiser; A. Kolbmüller; S. Müller; A. Gebhardt; S. Risse; R. Eberhardt

doi:10.1364/OIC.2010.PDWD15

Optical Interference Coatings
OSA Technical Digest (Optica Publishing Group, 2010),
paper PDWD15
•https://doi.org/10.1364/OIC.2010.PDWD15

Ultra-precise optical components with machinable silicon layer

M. Schürmann, P.-J. Jobst, N. Kaiser, A. Kolbmüller, S. Müller, A. Gebhardt, S. Risse, and R. Eberhardt

Optical Interference Coatings 2010

Tucson, Arizona United States
6–11 June 2010
ISBN: 978-1-55752-891-9

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M. Schürmann, P. -. Jobst, N. Kaiser, A. Kolbmüller, S. Müller, A. Gebhardt, S. Risse, and R. Eberhardt, "Ultra-precise optical components with machinable silicon layer," in Optical Interference Coatings, OSA Technical Digest (Optica Publishing Group, 2010), paper PDWD15.

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Abstract

Several micron thick silicon films deposited by magnetron sputtering have a nearly amorphous structure. Optical elements coated with theses films can be machined, polished, and structured in order to achieve ultra-precise optical components.

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