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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 6-11, 2010
ISBN: 978-1-55752-891-9
Coating Stress (WD)

Ultra-precise Optical Components with Machinable Silicon Layer

Mark Schürmann, Paul-Johannes Jobst, Norbert Kaiser, Andreas Kolbmüller, Sandra Müller, Andreas Gebhardt, Stefan Risse, and Ramona Eberhardt


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Several micron thick silicon films deposited by magnetron sputtering have a nearly amorphous structure. Optical elements coated with theses films can be machined, polished, and structured in order to achieve ultra-precise optical components.

© 2010 The Optical Society

OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.5450) Optics at surfaces : Polishing
(310.0310) Thin films : Thin films
(310.6870) Thin films : Thin films, other properties

M. Schürmann, P. Jobst, N. Kaiser, A. Kolbmüller, S. Müller, A. Gebhardt, S. Risse, and R. Eberhardt, "Ultra-precise Optical Components with Machinable Silicon Layer," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper PDWD15.

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