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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 6-11, 2010
ISBN: 978-1-55752-891-9
Materials (ThA)

Development of Empirical Models for the Prediction of Refractive Index of Optical Thin Film Materials in Ion Beam Assisted Evaporation Processes

Dirk Isfort, Stephane Bruynooghe, Diana Tonova, and Stefan Spinzig

http://dx.doi.org/10.1364/OIC.2010.ThA5


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Abstract

Empirical Models for the prediction of spatial distribution of refractive index and film thickness of thin films on optical substrates have been developed as a function of processing parameters during ion assisted evaporation for Ta2O5.

© 2010 The Optical Society

OCIS Codes
(160.0160) Materials : Materials
(160.4670) Materials : Optical materials
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization

Citation
D. Isfort, S. Bruynooghe, D. Tonova, and S. Spinzig, "Development of Empirical Models for the Prediction of Refractive Index of Optical Thin Film Materials in Ion Beam Assisted Evaporation Processes," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper ThA5.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2010-ThA5


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