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Conferences > OIC > 2010 > ThD > ThD10

The evaluation and analysis of polished fused silica subsurface quality by nanoindenter technique

Bin Ma, Zhengxiang Shen, Pengfei He, Fei Sha, Chunliang Wang, Bin Wang, Yiqin Ji, Huasong Liu, Weihao Li, and Zhanshan Wang

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Abstract

The nanoinderter technique is introduced to evaluate the subsurface quality of polished SiO2 samples. Some noticeable differences are found between the two kinds of results in terms of mechanical parameters and constant indented topography.

© 2010 Optical Society of America

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