Scatter analysis is an effective method for characterization of thin film components. For flexible and easy use in research and industry the high-sensitive table-top system ALBATROSS-TT with full 3-D-spherical measurement capability has been developed.
© 2010 The Optical Society
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(240.0240) Optics at surfaces : Optics at surfaces
(240.5770) Optics at surfaces : Roughness
A. von Finck, M. Hauptvogel, and A. Duparré, "Instrument for Close-to-Process Light Scatter Measurements of Thin Film Coatings and Substrates," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper ThD4.