Broadband Optical Monitoring Combined with Additional Rate Measurement for Accurate and Robust Coating Processes

Stephan Waldner; Rico Benz; Patrick Biedermann; Allan Jaunzens

doi:10.1364/OIC.2010.TuC10

Optical Interference Coatings
OSA Technical Digest (Optica Publishing Group, 2010),
paper TuC10
•https://doi.org/10.1364/OIC.2010.TuC10

Broadband Optical Monitoring Combined with Additional Rate Measurement for Accurate and Robust Coating Processes

Stephan Waldner, Rico Benz, Patrick Biedermann, and Allan Jaunzens

Optical Interference Coatings 2010

Tucson, Arizona United States
6–11 June 2010
ISBN: 978-1-55752-891-9

From the session
Optical Monitoring (TuC)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
S. Waldner, R. Benz, P. Biedermann, and A. Jaunzens, "Broadband Optical Monitoring Combined with Additional Rate Measurement for Accurate and Robust Coating Processes," in Optical Interference Coatings, OSA Technical Digest (Optica Publishing Group, 2010), paper TuC10.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We present a monitoring technique that combines broadband optical monitoring for accurate layer termination with quartz crystal monitoring ensuring the robustness of the process. Results both from sputter and electron beam evaporation tools are shown.

PDF Article

More Like This

Hybrid Mode Optical Monitoring – Monochromatic and Broadband Algorithms in the same Coating Process

Stephan Waldner, Jürgen Buchholz, and Rico Benz
WA.9 Optical Interference Coatings (OIC) 2019

Versatile Optical Monitoring System with both Broadband and Monochromatic Algorithms

Stephan Waldner and Jürgen Buchholz
WC.5 Optical Interference Coatings (OIC) 2016

Hybrid Process Control for Precision Optics Enhanced by Computational Manufacturing

H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau
TuC6 Optical Interference Coatings (OIC) 2010

Previous Article Next Article