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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 6-11, 2010
ISBN: 978-1-55752-891-9
Optical Monitoring (TuC)

Optical Monitor with Computed Compensation

William H. Southwell

http://dx.doi.org/10.1364/OIC.2010.TuC2


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Abstract

This optical monitor uses an analytic reflectance model and fits the thickness error of the previous layer. The computed compensation (current and next layer) may be applied for a wavelength other than the monitor wavlength.

© 2010 The Optical Society

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.6805) Thin films : Theory and design

Citation
W. H. Southwell, "Optical Monitor with Computed Compensation," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper TuC2.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2010-TuC2


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