This optical monitor uses an analytic reflectance model and fits the thickness error of the previous layer. The computed compensation (current and next layer) may be applied for a wavelength other than the monitor wavlength.
© 2010 The Optical Society
W. H. Southwell, "Optical Monitor with Computed Compensation," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper TuC2.
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