A thin film deposition monitoring system has been developed. The system monitors deposition processes over a broadband spectrum. Compared with quartz crystal monitoring, initial results from the new broadband monitor are stably reproducible.
© 2010 The Optical Society
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2440) Instrumentation, measurement, and metrology : Filters
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4830) Optical design and fabrication : Systems design
S. A. Atarah, A. Voronov, S. Song, and F. Placido, "Integrated Method for Control and Broadband Monitoring of Multilayer Thin Films," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper TuC9.
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