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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 6-11, 2010
ISBN: 978-1-55752-891-9
Optical Monitoring (TuC)

Integrated Method for Control and Broadband Monitoring of Multilayer Thin Films

Samuel A. Atarah, Andrey Voronov, Shigeng Song, and Frank Placido

http://dx.doi.org/10.1364/OIC.2010.TuC9


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Abstract

A thin film deposition monitoring system has been developed. The system monitors deposition processes over a broadband spectrum. Compared with quartz crystal monitoring, initial results from the new broadband monitor are stably reproducible.

© 2010 The Optical Society

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2440) Instrumentation, measurement, and metrology : Filters
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4830) Optical design and fabrication : Systems design

Citation
S. A. Atarah, A. Voronov, S. Song, and F. Placido, "Integrated Method for Control and Broadband Monitoring of Multilayer Thin Films," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper TuC9.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2010-TuC9


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