The effective refractive index of organic layers can be reduced by plasma etching. Super broadband AR coatings are obtained by combining those artificial low-index layers with conventionally prepared interference stacks.
© 2010 The Optical Society
U. Schulz and N. Kaiser, "Antireflective Coating with Nanostructured Organic Top-Layer," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper WA2.
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