Laser interference lithography method was used to form patterned sapphire substrate (PSS). Three-dimensional photonics crystal was formed by auto-cloning the PSS with alternate Ta2O5/SiO2coatings. Light emission of the sapphire-based LED can therefore be manipulated.
© 2010 The Optical Society
C. Y. Huang, H. M. Ku, and S. Chao, "Fabrication of Three Dimensional Auto-Cloned Photonics Crystal on Sapphire Substrate," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper WB3.
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