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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 6-11, 2010
ISBN: 978-1-55752-891-9
Photonic Structure and Plasma-Polymerized Films (WB)

Fabrication of Three Dimensional Auto-Cloned Photonics Crystal on Sapphire Substrate

Chen Yang Huang, Hao Min Ku, and Shiuh Chao


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Laser interference lithography method was used to form patterned sapphire substrate (PSS). Three-dimensional photonics crystal was formed by auto-cloning the PSS with alternate Ta2O5/SiO2coatings. Light emission of the sapphire-based LED can therefore be manipulated.

© 2010 The Optical Society

OCIS Codes
(230.0230) Optical devices : Optical devices
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(230.5298) Optical devices : Photonic crystals

C. Y. Huang, H. M. Ku, and S. Chao, "Fabrication of Three Dimensional Auto-Cloned Photonics Crystal on Sapphire Substrate," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper WB3.

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