We fabricated TiO2/SiO22-D polarization beam splitters using electron beam gun evaporation with ion-beam-assisted deposition. Symmetric structure designs have been applied to reduce ripples and achieve 200 nm of working range.
© 2010 The Optical Society
S. Chen, C. Wang, K. Chai, T. Chang, Y. Yeh, C. Lee, S. Ku, and C. Huang, "Polarization Beam Splitters with Autocloned Symmetric Structure," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper WC4.
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