Ion-assisted evaporation is used to dielectric coat gratings in a process scalable to manufacturing on meter-scale substrates. Conformal coating is the critical step in Self-Aligned Double Patterning used to extend the resolution of optical lithography.
© 2010 The Optical Society
(050.0050) Diffraction and gratings : Diffraction and gratings
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(050.6624) Diffraction and gratings : Subwavelength structures
B. MacLeod, D. J. Smith, B. Xu, S. D. Smith, and M. McCullough, "Ion Assisted Deposition of Conformal Coatings for the Manufacture of Large Area Wire Grid Polarizers," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper WC5.
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