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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 6-11, 2010
ISBN: 978-1-55752-891-9
Coating Stress (WD)

Modification of Stresses in Evaporated Hafnia Coatings for Use in Vacuum

James B. Oliver, Pete Kupinski, Amy L. Rigatti, Ansgar W. Schmid, John C. Lambropoulos, Semyon Papernov, Alexei Kozlov, and Robert D. Hand


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Tensile stresses in hafnia/silica coatings used in vacuum are modified by changes in process variables and design. Stress aging is extended through the use of thin-layer designs, but long-term improvements in stress are not realized.

© 2010 The Optical Society

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.4925) Thin films : Other properties (stress, chemical, etc.)

J. B. Oliver, P. Kupinski, A. L. Rigatti, A. W. Schmid, J. C. Lambropoulos, S. Papernov, A. Kozlov, and R. D. Hand, "Modification of Stresses in Evaporated Hafnia Coatings for Use in Vacuum," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper WD6.

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