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Conference Paper
Optical Interference Coatings
Tucson, Arizona United States
June 6-11, 2010
ISBN: 978-1-55752-891-9
Coating Stress (WD)

Effect of Thermal Annealing on the Residual Stress of Graded-Index-Like Films Deposited by RF Ion-Beam Sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Kun-Hsien Lee, and Cheng-Chung Lee

http://dx.doi.org/10.1364/OIC.2010.WD8


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Abstract

Composite film of Ta-Si oxide with graded-index-like films has been realized by using RF ion-beam sputtering. The influence of thermal annealing on residual stress of single layer composite films and graded-index-like films has been studied.

© 2010 The Optical Society

OCIS Codes
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization
(310.4925) Thin films : Other properties (stress, chemical, etc.)

Citation
C. Tang, C. Jaing, K. Lee, and C. Lee, "Effect of Thermal Annealing on the Residual Stress of Graded-Index-Like Films Deposited by RF Ion-Beam Sputtering," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper WD8.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2010-WD8


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