Composite film of Ta-Si oxide with graded-index-like films has been realized by using RF ion-beam sputtering. The influence of thermal annealing on residual stress of single layer composite films and graded-index-like films has been studied.
© 2010 The Optical Society
C. Tang, C. Jaing, K. Lee, and C. Lee, "Effect of Thermal Annealing on the Residual Stress of Graded-Index-Like Films Deposited by RF Ion-Beam Sputtering," in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), paper WD8.
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