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Conference Paper
Optical Interference Coatings
Whistler Canada
June 16-21, 2013
ISBN: 978-1-55752-970-1
LIDT II: ns-regime (FB)

Laser conditioning effect of HfO2/SiO2 film using focused ion beam

Yaowei Wei, Hao Liu, Zhe Zhang, Yi Zheng, Singlin Chen, and Ping Ma  »View Author Affiliations


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Focused ion beam (FIB) was few reported using on laser films, it was used to study the damage morphology and exploring the cause of damage.

© 2013 OSA

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(310.1210) Thin films : Antireflection coatings
(310.1860) Thin films : Deposition and fabrication

Y. Wei, H. Liu, Z. Zhang, Y. Zheng, S. Chen, and P. Ma, "Laser conditioning effect of HfO2/SiO2 film using focused ion beam," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optical Society of America, 2013), paper FB.8.

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