A novel Zr/Mg multilayer mirror for extreme ultraviolet (EUV) spectral range was proposed and deposited by magnetron sputtering. The near-normal-incidence reflectance is 30.6% at wavelength λ=30.4 nm (He-II emission line).
© 2013 OSA
J. Zhu, H. Li, S. Zhou, Z. Wang, P. Jonnard, and K. Guen, "Zr/Mg multilayer mirror for extreme ultraviolet application," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optical Society of America, 2013), paper FC.2.
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