IBS coatings were examined after deposition and after a defined annealing process. The optical and mechanical properties were improved significantly. The remaining coating stress can directly be controlled by selected process parameters.
© 2013 OSA
M. Bischoff, T. Nowitzki, O. Voß, S. Wilbrandt, and O. Stenzel, "Post-deposition treatment of IBS coatings for UV applications," in Optical Interference Coatings Postdeadline, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optical Society of America, 2013), paper PMB.10.
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