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Conference Paper
Optical Interference Coatings
Whistler Canada
June 16-21, 2013
ISBN: 978-1-55752-974-9
Applications I (MB)

Post-deposition treatment of IBS coatings for UV applications

Martin Bischoff, Tobias Nowitzki, Oliver Voß, Steffen Wilbrandt, and Olaf Stenzel  »View Author Affiliations


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IBS coatings were examined after deposition and after a defined annealing process. The optical and mechanical properties were improved significantly. The remaining coating stress can directly be controlled by selected process parameters.

© 2013 OSA

OCIS Codes
(160.4670) Materials : Optical materials
(160.4760) Materials : Optical properties
(310.3840) Thin films : Materials and process characterization

M. Bischoff, T. Nowitzki, O. Voß, S. Wilbrandt, and O. Stenzel, "Post-deposition treatment of IBS coatings for UV applications," in Optical Interference Coatings Postdeadline, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optical Society of America, 2013), paper PMB.10.

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