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Optics InfoBase > Conference Papers > OIC > 2013 > MB > Page PMB.10 © 2013 OSA

Conference Paper
Optical Interference Coatings
Whistler Canada
June 16-21, 2013
ISBN: 978-1-55752-974-9
Applications I (MB)

Post-deposition treatment of IBS coatings for UV applications

Martin Bischoff, Tobias Nowitzki, Oliver Voß, Steffen Wilbrandt, and Olaf Stenzel  »View Author Affiliations


http://dx.doi.org/10.1364/OIC.2013.PMB.10


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Abstract

IBS coatings were examined after deposition and after a defined annealing process. The optical and mechanical properties were improved significantly. The remaining coating stress can directly be controlled by selected process parameters.

© 2013 OSA

OCIS Codes
(160.4670) Materials : Optical materials
(160.4760) Materials : Optical properties
(310.3840) Thin films : Materials and process characterization

Citation
M. Bischoff, T. Nowitzki, O. Voß, S. Wilbrandt, and O. Stenzel, "Post-deposition treatment of IBS coatings for UV applications," in Optical Interference Coatings Postdeadline, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optical Society of America, 2013), paper PMB.10.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2013-PMB.10


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