Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 2013 > TB > TB.7

Design and Performance Evaluation of bi-functional Multilayers in EUV region

Li Jiang and Zhanshan Wang

Not Accessible

Your library or personal account may give you access

Abstract

A bi-functional multilayer was designed by optimizing the thickness of several layers that were close to the air-film interface. The multilayer structure was evaluated by comparison with another result obtained by optimizing all layer thickness.

© 2013 Optical Society of America

PDF Article
More Like This
Design of Aperiodic Multilayers for EUV Applications

A. Tikhonravov, M. Trubetskov, S. Sharapova, and Z. Wang
TB.8 Optical Interference Coatings (OIC) 2013

Evaluation of Mo-Based Multilayer EUV Mirrors

Hisataka Takenaka, Tomoaki Kawamura, Yoshikazu Ishii, Tsuneyuki Haga, and Hiroo Kinoshita
EC.26 Extreme Ultraviolet Lithography (EUL) 1994

Design of Coatings in EUV, Soft X-ray and X-ray Spectral Regions

A. Tikhonravov, M. Trubetskov, S. Sharapova, and Z. Wang
TB.6 Optical Interference Coatings (OIC) 2013

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use