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Conference Paper
Optical Interference Coatings
Whistler Canada
June 16-21, 2013
ISBN: 978-1-55752-970-1
Sputter Deposition (ThB)

Recent results of optical coatings deposited on the EOSS coater

Daniel Rademacher, Michael Vergöhl, and Stefan Bruns  »View Author Affiliations


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In 2011 an optical interference manufacturing platform called EOSS was presented by the Fraunhofer IST. This platform employs cylindrical cathodes in a special sputter-up configuration. The latest results obtained at this coater are presented.

© 2013 OSA

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

D. Rademacher, M. Vergöhl, and S. Bruns, "Recent results of optical coatings deposited on the EOSS coater," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optical Society of America, 2013), paper ThB.5.

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