In 2011 an optical interference manufacturing platform called EOSS was presented by the Fraunhofer IST. This platform employs cylindrical cathodes in a special sputter-up configuration. The latest results obtained at this coater are presented.
© 2013 OSA
D. Rademacher, M. Vergöhl, and S. Bruns, "Recent results of optical coatings deposited on the EOSS coater," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optical Society of America, 2013), paper ThB.5.
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