Magnetron sputtering offers a flexible and high throughput deposition process for optical coatings. Sputtering uses two or more metal targets, depositing multilayers comprising dielectrics, metals and conductive oxides.
© 2013 OSA
D. Gibson, J. Martin, F. Placido, and D. Childs, "Small Batch High Throughput Plasma Activated Magnetron Sputtering System," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optical Society of America, 2013), paper ThB.8.
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