We report on the application of apertureless THz microscopy for sensing charge carrier distributions in semiconductors on submicron scales. A spatial resolution of less than 1 micron allows for the detection of about 1000 electrons.
© 2005 Optical Society of America
F. F. Buersgens, R. Kersting, and H. T. Chen, " THz Microscopy of Charge Carrier Distributions," in Optical Terahertz Science and Technology, Technical Digest (CD) (Optical Society of America, 2005), paper TuC2.
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