By using the direct-write e-beam technique with liquid phase epitaxy LiNbO3 thin films, we have successfully produced sub-micron domain structures for achieving dynamically switchable filters in a periodically poled lithium niobate (PPLN) waveguide. The effects of direct-write e-beam parameters are investigated to achieve sub-micron periodic domain structures in homoepitaxial liquid phase epitaxy (LPE) LiNbO3 thin films. More regular structures appear at acceleration voltages higher than 20 kV and areal dose range 350 µC/cm2 ~ 450 µC/cm2 with lower scanning speeds. Under these optimal conditions, an approximately 500 µm-long grating of a 1.1 µm period, consisting ~180 nm domains is achieved.
© 2005 Optical Society of America
J. Son, Y. Yuen, S. S. Orlov, and L. Hesselink, "Photorefractive Effects, Materials, and Devices Effects of e-Beam Parameters on Sub-micron Ferroelectric Domain Engineering in Liquid Phase Epitaxy LiNbO3 by Direct-Write e-Beam," in Photorefractive Effects, Materials, and Devices, G. Zhang, D. Kip, D. Nolte, and J. Xu, eds., Vol. 99 of OSA Trends in Optics and Photonics (Optical Society of America, 2005), paper 756.
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