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Conference Paper
Photonic Applications Systems Technologies Conference
Baltimore, Maryland United States
May 23-28, 2005
ISBN: 1-55752-770-9
Lasers in Microelectronics Manufacturing (PWE)

Developments in Beam Shaping Applications Using Diffractive Optics for Mircoelectronics Manufacturing

Todd Lizotte, Orest P. Ohar, and Richard Rosenberg

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Abstract

Full-text article is not available.

© 2005 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1970) Diffraction and gratings : Diffractive optics
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3300) Lasers and laser optics : Laser beam shaping

Citation
T. Lizotte, O. P. Ohar, and R. Rosenberg, " Developments in Beam Shaping Applications Using Diffractive Optics for Mircoelectronics Manufacturing," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications, Systems and Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper PWE3.
http://www.opticsinfobase.org/abstract.cfm?URI=PhAST-2005-PWE3


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