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© 2005 Optical Society of America
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1970) Diffraction and gratings : Diffractive optics
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3300) Lasers and laser optics : Laser beam shaping
T. Lizotte, O. P. Ohar, and R. Rosenberg, " Developments in Beam Shaping Applications Using Diffractive Optics for Mircoelectronics Manufacturing," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications, Systems and Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper PWE3.
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