We will review the status of current laser based crystallization processes, and discuss the specifications and the critical design aspects of the laser and of the optical system developed for the TCZ production tool.
© 2006 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2040) Instrumentation, measurement, and metrology : Displays
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.2180) Lasers and laser optics : Excimer lasers
D. Knowles and B. Klene, "Laser Crystallization for Flat Panel Displays," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper PTuB1.