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Conference Paper
Photonic Applications Systems Technologies Conference
Long Beach, California United States
May 22, 2006
ISBN: 1-55752-813-6
Laser Processing in Display Production (PTuB)

Methods and Tools for Semiconductor Annealing and Silicon Thin Film Crystallization Using Solid-State Lasers

Peter M. Oesterlin

http://dx.doi.org/10.1364/PHAST.2006.PTuB2


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Abstract

Abstract: For future 65 nm and smaller nodes, thermal anneal processes in the ms and µs range are required. Based on laboratory tests using the line scan method, an R&D system has been developed.

© 2006 Optical Society of America

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3390) Lasers and laser optics : Laser materials processing
(160.0160) Materials : Materials
(160.6000) Materials : Semiconductor materials

Citation
P. M. Oesterlin, "Methods and Tools for Semiconductor Annealing and Silicon Thin Film Crystallization Using Solid-State Lasers," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper PTuB2.
http://www.opticsinfobase.org/abstract.cfm?URI=PhAST-2006-PTuB2


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