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Conference Paper
Photonic Applications Systems Technologies Conference
Long Beach, California United States
May 22, 2006
ISBN: 1-55752-813-6
High Resolution Laser Micromachining (PWB)

Laser Micromachining of ORMOCERs for High Resolution Fabrication of Optical Devices

Loic Mager, Estelle Clauss, Alain Fort, Joël Fontaine, and Christiane Carré

http://dx.doi.org/10.1364/PHAST.2006.PWB3


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Abstract

We present optical waveguides and diffractive optical elements fabricated by laser micromachining of original hybrid Si/Ti/Org ORMOCERs. We demonstrate that the material response to laser ablation allows fabrication of structures at submicrometric scale.

© 2006 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1970) Diffraction and gratings : Diffractive optics
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication

Citation
L. Mager, E. Clauss, A. Fort, J. Fontaine, and C. Carré, "Laser Micromachining of ORMOCERs for High Resolution Fabrication of Optical Devices," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper PWB3.
http://www.opticsinfobase.org/abstract.cfm?URI=PhAST-2006-PWB3

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