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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper PWB3
  • https://doi.org/10.1364/PHAST.2006.PWB3

Laser micromachining of ORMOCERs for high resolution fabrication of optical devices

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Abstract

We present optical waveguides and diffractive optical elements fabricated by laser micromachining of original hybrid Si/Ti/Org ORMOCERs. We demonstrate that the material response to laser ablation allows fabrication of structures at submicrometric scale

© 2006 Optical Society of America

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