We present optical waveguides and diffractive optical elements fabricated by laser micromachining of original hybrid Si/Ti/Org ORMOCERs. We demonstrate that the material response to laser ablation allows fabrication of structures at submicrometric scale.
© 2006 Optical Society of America
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1970) Diffraction and gratings : Diffractive optics
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
L. Mager, E. Clauss, A. Fort, J. Fontaine, and C. Carré, "Laser Micromachining of ORMOCERs for High Resolution Fabrication of Optical Devices," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper PWB3.