Modeling and control aspects of deformable MEMS mirror influenced by force matrix is presented. The forward solution is given using Navier's method. Inverse solution approach is discussed for finding force matrix, given a deformation matrix.
© 2012 OSA
K. S. Tripurari and R. N. Banavar, "Modeling of Deformable MEMS Mirrors in Modern Telescopes," in International Conference on Fibre Optics and Photonics, OSA Technical Digest (online) (Optical Society of America, 2012), paper MPo.21.
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