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Conference Paper
International Conference on Fibre Optics and Photonics
Chennai India
December 9-12, 2012
Poster Session I (MPo)

Modeling of Deformable MEMS Mirrors in Modern Telescopes

Kumar S. Tripurari and Ravi N. Banavar  »View Author Affiliations


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Modeling and control aspects of deformable MEMS mirror influenced by force matrix is presented. The forward solution is given using Navier's method. Inverse solution approach is discussed for finding force matrix, given a deformation matrix.

© 2012 OSA

OCIS Codes
(350.1260) Other areas of optics : Astronomical optics
(230.4685) Optical devices : Optical microelectromechanical devices

K. S. Tripurari and R. N. Banavar, "Modeling of Deformable MEMS Mirrors in Modern Telescopes," in International Conference on Fibre Optics and Photonics, OSA Technical Digest (online) (Optical Society of America, 2012), paper MPo.21.

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