Reflective micro-optical components for shaping non-diffracting beam arrays were fabricated by proportional transfer of continuous resist profiles into silica and silicon via e-beam writing and gray-tone lithography. Low dispersion multiplexing of 10-fs pulses was demonstrated.
© 2006 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.3740) Optical design and fabrication : Lithography
(350.0350) Other areas of optics : Other areas of optics
(350.3950) Other areas of optics : Micro-optics
M. Ferstl, G. Devendra, R. Grunwald, and M. Bock, "Lithographically Fabricated Micro-Optical Array Beam Shapers for Ultra-Short Pulse Lasers," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper JThC98.
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