We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 micron features that is buried beneath an Al film. Simulation results for higher resolution measurements are also described.
© 2006 Optical Society of America
J. Klein, T. B. Norris, B. Daly, S. Pau, D. M. Tennant, J. A. Taylor, and J. E. Bower, "Nanoscale Imaging with Coherent Acoustic Phonons Pulses," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2006), paper QMB3.
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