Abstract
We report here the design and experimental results on surface-normal optical filters based on Fano resonance in patterned single crystalline silicon nanomembranes (SiNM), which were fabricated and transferred onto transparent glass substrates using a disruptive SiNM wet transfer process. The measured filter transmission results agree well with the design. Further design and process optimizations can lead to high Q filters, suitable for ultra-compact surface normal filters, switches and modulators.
© 2008 Optical Society of America
PDF ArticleMore Like This
Hongjun Yang, Li Chen, Zexuan Qiang, Huiqing Pang, Zhenqiang Ma, and Weidong Zhou
SaH3 Asia Optical Fiber Communication and Optoelectronic Exposition and Conference (ACP) 2008
Xiaochuan Xu, Harish Subbaraman, Amir Hosseini, and Ray T. Chen
CTh1J.2 CLEO: Science and Innovations (CLEO:S&I) 2013
Weidong Zhou and Zhenqiang Ma
IM2A.7 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2013