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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JThA87

Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates

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Abstract

We report here the design and experimental results on surface-normal optical filters based on Fano resonance in patterned single crystalline silicon nanomembranes (SiNM), which were fabricated and transferred onto transparent glass substrates using a disruptive SiNM wet transfer process. The measured filter transmission results agree well with the design. Further design and process optimizations can lead to high Q filters, suitable for ultra-compact surface normal filters, switches and modulators.

© 2008 Optical Society of America

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