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Conference Paper
Quantum Electronics and Laser Science Conference
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
CLEO/QELS Poster Session I (JTuA)

Nanofabrication of Sub-Wavelength Grating Using Ultra-Fine Nano-Machining Process

Jun Nakajima and Fumio Koyama

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Abstract

We present the nanofabrication of sub-wavelength grating using ultra-fine nano-machining process. We successfully demonstrate the nano-machining fabrication of 20 nm grating pitch for nano-structured photonic devices, which is also used for thermal nano-imprint mold.

© 2008 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication

Citation
J. Nakajima and F. Koyama, "Nanofabrication of Sub-Wavelength Grating Using Ultra-Fine Nano-Machining Process," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JTuA34.
http://www.opticsinfobase.org/abstract.cfm?URI=QELS-2008-JTuA34


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